Scanning Probe Microscope Tips

Images courtesy of Digital Instruments www.di.com
9/28/00
2cant-substrate 4cantilevers EtchedSitip EtchedSITMprobe Olympus
Two cantilever
substrate 		Four cantilevers
on a substrate 		Etched silicon tip Etched silicon tip
and probe 		Oxide-sharpened
silicon nitride
probe
R3c2 rotatedTESP RTESP Si SiNProbeSchem
Tappingmode focused
ion beam machined
silicon probe 		Rotated tappingmode
etched silicon probe 		Rotated tappingmode
etched silicon probe 		Tappingmode etched
silicon probe 		Tip sidewall angles
of silicon nitride
probes
SiNTip02 SiNTipclose supercone
Silicon nitride
(standard) probe 		Silicon nitride
(standard) probe
closeup 		IBM Super Cone
probe
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